Integrated Dual-Axis Gyro IDG-500 InvenSense, Inc
DESCRIPTION The IDG-500 is an integrated dual-axis angular rate sensor (gyroscope). It uses InvenSenses proprietary and patented MEMS technology with vertically driven, vibrating masses to make a functionally complete, low-cost, dual-axis angular rate sensor. All required electronics are integrated onto a single chip with the sensor. The IDG-500 gyro uses two sensor elements with novel vibrating dual-mass bulk silicon configurations that sense the rate of rotation about the X- and Y-axis (in-plane sensing). This results in a unique, integrated dual-axis gyro with guaranteed-by-design vibration rejection and high cross-axis isolation. It is specifically designed for demanding consumer applications requiring low cost, small size and high performance. The IDG-500 gyro includes the integrated electronics necessary for application-ready functionality. It incorporates X- and Y-axis low-pass filters and an EEPROM for on-chip factory calibration of the sensor. Factory trimmed scale factors eli FEATURES Integrated X- and Y-axis gyros on a single chip Two separate outputs per axis for standard and high sensitivity: X-/Y-Out Pins: 500/s full scale range 2.0mV//s sensitivity X/Y4.5Out Pins: 110/s full scale range 9.1mV//s sensitivity Integrated amplifiers and low-pass filters Auto-Zero function On-chip temperature sensor High vibration rejection over a wide frequency range High cross-axis isolation by proprietary MEMS design 3V single-supply operation Hermetically sealed for temp and humidity resistance 10,000 g shock tolerant Smallest dual axis gyro package at 4 x 5 x 1.2mm RoHS and Green Compliant APPLICATIONS General Motion Sensing Vehicle Motion Analysis Platform Stabilization Inertial Measurement Units GENERAL DESCRIPTION The IDG-500 is an integrated dual-axis angular rate sensor (gyroscope). It uses InvenSenses proprietary and patented MEMS technology with vertically driven, vibrating masses to make a functionally complete, low-cost, dual-axis angular rate sensor. All requ SPECIFICATIONS All parameters specified are @
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ON-TIME, ZERO-RATE, IDG-500, Y-OUT, DS-IDG-0500B-00-01, X-OUT, AZRESVVREFIDG-500Y-OUT, OUTIDG-500, AZRESVVREFIDG-500
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